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Spare Parts

If you require spare parts for your installed systems, please contact our Service Administration to obtain information on price and lead time of spare parts for the systems you have purchased from us.

Phone: +49 351 20758-585
Email: spares@hseb-dresden.de

General this also applies for microscopes of the Axiotron range, wafer handlers and accessories, which have been purchased before 2004 from Carl Zeiss.