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These tools are not part of HSEB actual product range anymore. Of course, service, support and spare parts are still available. Please contact our Service Department for an inquiry.

Axiospect 201
  • Semi-automated wafer inspection system for 150 mm and 200 mm.
  • Discontinued as of December 31, 2009.
  • Fully replaced by Axiospect 202.
  • Spare parts and consumables are still available.


ZML 200
  • Table-top wafer handler with Axiotron 2 microscope.
  • Full flexibility of microscopic options available to the Axiotron.
  • Back side macro inspection.
  • Easily accessible control panel.


Axiospect 200, AxioWis
  • Semi-automated wafer inspection system for 150 mm and 200 mm.
  • Discontinued as of June 01, 2006.
  • The successor of this tool was the Axiospect 201.
  • Spare parts and consumables are still available.


Axiosprint
  • Ergonomically designed visual inspection system for 150 mm and 200 mm wafers.
  • Based on Axiotron 2 microscope.
  • Automatic wafer transfer from cassette to stage and back.
  • Contact-free centring and prealignment.
  • Target cassette selectable depending on inspection result.