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Axiospect 300

Semi-automated inspection and review system for 300 mm wafers.
Vacuum-grip tool for front side wafer inspection.
Replaced by it's successor Axiospect 301.

  • Well-established 300 mm wafer inspection and review system.
  • More than one hundred systems sold world-wide.
  • Microscopic, macroscopic and edge inspection capability.
  • Main differences to the Axiospect 301: vacuum wafer handling and front side microscopic inspection only.
  • Although being a "legacy" system, it is still available for customer who follow a "copy exactly" policy.
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