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Defect Documentation

Easy point-and-click registration of visually discovered macro defects.
Software add-on to manual macro station.
Coordinate export in KLA format.

Features
  • Optional add-on for the HSEB macro station.
  • Automated documentation of macro defects under precisely the same viewing conditions as of the operator.
  • Independent of wafer position (tilt angle, rotation), precisely calculated coordinates are determined.
  • Transparent wafer festure allows to see already discovered defects at the reverse wafer side.
  • KLARF export to enable convenient macro defect review, for example on a microscope; file format supports back side information.
  • Manual defect classification by means of customer-defined defect code list.
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