Image Comparison between Brightfield and CSM VIS

Sample planes that are close to the objective appear blue, while more distant sample parts are represented in red. The images below demonstrate this effect. On the left, a prober mark is visible. The indentation is instantly apparent. The right image shows a via pattern, in which the concentricity of the different layers can easily be judged.

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CSM VIS images allow for approximately 5 microns of depth of focus in the 50x objective. This is about five times more than with conventional brightfield. As a result, less focussing is required.

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