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Macro Only / Edge Only Tools

Derivatives to the highly modular Axiospect system.
Contain only those modules that are required for the actual application.
Typical configurations: "Edge Only" and "Macro Only".

  • Come without microscope module.
  • Semi-automatic edge or macro inspection with Defect Documentation
  • Same applications software, same capabilities of SECS/GEM, E84 etc.
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