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High throughput fully automated edge inspection and EBR metrology system
Full coverage of all five edge zones
Lowest COO in industry - enabling full Fab, production and tool monitoring

Key Features

  • Available stand-alone, as module for ODIN, WOTAN and AXIOSPECT‎
  • Easy-to-integrate OEM module
  • Defect inspection on flat, bevel and apex (particles, handling marks, chipouts, ‎delamination etc.)‎

Advanced metrology package

  • Multi-line EBR measurement
  • Defect detection and metrology on bare and overprinted areas
  • WEE monitoring
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