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WOTAN

High throughput fully automated optical inspection (AOI) system
Dedicated to OQA, excursion control, Fab and tool monitoring at lowest COO
Recipe-free operation

Key features

  • Highest throughput for <20 µm resolution in industry
  • Simultaneous front and back side scan, optional edge inspection‎
  • For 100% excursion control
  • Teams with ODIN and THOR options

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